Products
Product Introduction
TDK LOAD PORT
FOUP LOAD PORT TAS300
E4 TYPE
- The highest degree of cleanness ever achieved in the industry The number of microscopic particles reduced to the absolute minimum. The world’s highest ever recorded level in a PWP test
- High Compatibility-compatible with the FOUP of every company A unique mechanism, highly adaptable to the smallest difference in each FOUP, prevents any impact between the FOUP and the load port; secure and reliable latch key insertion gives high compatibility.
- Improvements to maintenance Designed for easy maintenance:maintenance in the minimum of time; the unit can without difficulty be quickly customized for any semiconductor production line.
- High reliability and high durability TDK’s factory automation technology ensures excellent reliability, stability and durability.
TDK LOAD PORT
FOUP LOAD PORT TAS300
E4 TYPE
- The highest degree of cleanness ever achieved in the industry
The number of microscopic particles reduced to the absolute minimum. The world’s highest ever recorded level in a PWP test - High Compatibility-compatible with the FOUP of every company
A unique mechanism, highly adaptable to the smallest difference in each FOUP, prevents any impact between the FOUP and the load port;
secure and reliable latch key insertion gives high compatibility. - Improvements to maintenance
Designed for easy maintenance:maintenance in the minimum of time; the unit can without difficulty be quickly customized for any semiconductor production line. - High reliability and high durability
TDK’s factory automation technology ensures excellent reliability, stability and durability.
TDK LOAD PORT
FOUP LOAD PORT TAS300
J1 TYPE
- SEMI Standard
E15.1-0305/E57-0600/E62-0306/E63-1104/E64-1105
E110-1102/ S2-0706/S8-0308/S14-0704 - With all moving parts, including mapping unit, are installed below the wafer surface, which provides high-level particle-free design. The highest level of airflow analysis delivers particle-free design.
- The air-cushioned pneumatic drive on docking plate and FIMS door opening provide calibration-free operation, with a wide variety of FOUPs (Supports 300 mm FOUPs compliant with SEMI E47.1 and E62.)
- Transmission-type mapping unit optionally available.
- High-reliability design delivers trouble-free operation over a long period of time.
- Obstacle detection sensors on Dock position.
- FOUP/Placement detection.
- Easy positioning mechanism to reduce installation time for mounting and dismounting.
TDK LOAD PORT
FOUP LOAD PORT TAS300
J1 TYPE
- SEMI Standard
E15.1-0305/E57-0600/E62-0306/E63-1104/E64-1105
E110-1102/ S2-0706/S8-0308/S14-0704 - With all moving parts, including mapping unit, are installed below the wafer surface, which provides high-level particle-free design. The highest level of airflow analysis delivers particle-free design.
- The air-cushioned pneumatic drive on docking plate and FIMS door opening provide calibration-free operation, with a wide variety of FOUPs (Supports 300 mm FOUPs compliant with SEMI E47.1 and E62.)
- Transmission-type mapping unit optionally available.
- High-reliability design delivers trouble-free operation over a long period of time.
- Obstacle detection sensors on Dock position.
- FOUP/Placement detection.
- Easy positioning mechanism to reduce installation time for mounting and dismounting.
TDK LOAD PORT
FOUP LOAD PORT TAS300
A2 TYPE
- SEMI Standard MECHANICAL INTERFACE SPECIFICATION FOR 450mm LOAD PORT
- With all moving parts, including mapping unit, are installed below the wafer surface, which provides high-level particle- free design.
- Transmission-type mapping unit optionally available.
- Obstacle detection sensors on Dock position.
- FOUP/H-MAC presence / Placement detection
TDK LOAD PORT
FOUP LOAD PORT TAS300
A2 TYPE
- SEMI Standard MECHANICAL INTERFACE SPECIFICATION FOR 450mm LOAD PORT
- With all moving parts, including mapping unit, are installed below the wafer surface, which provides high-level particle- free design.
- Transmission-type mapping unit optionally available.
- Obstacle detection sensors on Dock position.
- FOUP/H-MAC presence / Placement detection
TDK LOAD PORT
FOUP LOAD PORT TAS300
MAC400 TYPE
- Tape Flame&Ring Flame 대응 Load Port
2001년 300mm용 wafer 출시 이후의 실적과 경험을 바탕으로 Tape Flame&Ring Flame LP의 기반을 확립 - ■ Built on a highly reliable design based on cumulative sales of over 150,000 LoadPort units for 300mm
■ Implementing ISO Class 4-5 by switching from Open Cassette to FOUP - Supports multiple FOUPs with high compatibility
An independent mechanism that responds to each FOUP’s micro-torsion prevents collisions between the FOUP and Load Port, and ensures high compatibility through reliable latch key operation
■ In addition to support for two major FOUP manufacturers, new FOUP support will be available starting in 2025
SEMI E185 FOUP에 대응 예정(2026~)
TDK LOAD PORT
FOUP LOAD PORT TAS300
MAC400 TYPE
- Tape Flame&Ring Flame 대응 Load Port
2001년 300mm용 wafer 출시 이후의 실적과 경험을 바탕으로 Tape Flame&Ring Flame LP의 기반을 확립
■ Built on a highly reliable design based on cumulative sales of over 150,000 LoadPort units for 300mm
■ Implementing ISO Class 4-5 by switching from Open Cassette to FOUP - Supports multiple FOUPs with high compatibility
An independent mechanism that responds to each FOUP’s micro-torsion prevents collisions between the FOUP and Load Port, and ensures high compatibility through reliable latch key operation
■ In addition to support for two major FOUP manufacturers, new FOUP support will be available starting in 2025
SEMI E185 FOUP에 대응 예정(2026~)
TDK LOAD PORT
FOUP LOAD PORT TAS300
PLP TYPE
- TDK Load Port
Leveraging the performance and experience since the launch of the 300mm wafer in 2001, we have established the foundation for the PLP Load Port
■ Built on a highly reliable design based on cumulative sales of over 150,000 LoadPort units for 300mm
■ A rich lineup of options, including flexible mapping - Supports FOUP with high compatibility
An independent mechanism that responds to each FOUP’s micro-torsion prevents collisions between the FOUP and Load Port, and ensures high compatibility through reliable latch key operation
■Standard compatible with 600mm x 600mm and 510mm x 510mm
■ Ranked number one in global market share, with over 1,000 units sold cumulatively since its launch in 2018 - Purge system that eliminates particles to the limit
Based on the expertise accumulated at the 300mm Load Port, we have implemented a variety of Purge Systems
■ Deploy systems tailored to specific purposes, such as FP/BP versions
TDK LOAD PORT
FOUP LOAD PORT TAS300
PLP TYPE
- TDK Load Port
Leveraging the performance and experience since the launch of the 300mm wafer in 2001, we have established the foundation for the PLP Load Port
■ Built on a highly reliable design based on cumulative sales of over 150,000 LoadPort units for 300mm
■ A rich lineup of options, including flexible mapping - Supports FOUP with high compatibility
An independent mechanism that responds to each FOUP’s micro-torsion prevents collisions between the FOUP and Load Port, and ensures high compatibility through reliable latch key operation
■Standard compatible with 600mm x 600mm and 510mm x 510mm
■ Ranked number one in global market share, with over 1,000 units sold cumulatively since its launch in 2018 - Purge system that eliminates particles to the limit
Based on the expertise accumulated at the 300mm Load Port, we have implemented a variety of Purge Systems
■ Deploy systems tailored to specific purposes, such as FP/BP versions
