제품소개
N2 PURGE FOR FOUP
- FOUP Internal Quick purge function
- FOUP bottom shape and specification not dependent
- Designing Safety Considerations-N2 Leak, Interlock, Static Electricity
- Keep FOUP internal relative humidity below 5% in door open state
N2 PURGE FOR FOUP
- FOUP Internal Quick purge function
- FOUP bottom shape and specification not dependent
- Designing Safety Considerations-N2 Leak, Interlock, Static Electricity
- Keep FOUP internal relative humidity below 5% in door open state
BOTTOM PURGE
<Special>
No change in FOUP height due to patent NOZZLE application.
<Introduction>
-MFC Real Time Flow Control
-Leak Free Nozzle Purge System
-FOUP Humidity Status Real Time Monitor
-User Interface Recipe Control
-O2 Detection Safety Interlock
-Easy Sequence
<Specification>
-3 in 1/ 1 in 1 FOUP N2 Purge
-N2 Inlet Filter: 0.025um
-N2 Inlet Leak Detection: Pressure Sensor
-Exhaust Pressure Detection: Pressure Sensor
-N2 Tube Material: SUS316, polyolefin
BOTTOM PURGE
<Special>
No change in FOUP height due to patent NOZZLE application.
<Introduction>
-MFC Real Time Flow Control
-Leak Free Nozzle Purge System
-FOUP Humidity Status Real Time Monitor
-User Interface Recipe Control
-O2 Detection Safety Interlock
-Easy Sequence
<Specification>
-3 in 1/ 1 in 1 FOUP N2 Purge
-N2 Inlet Filter: 0.025um
-N2 Inlet Leak Detection: Pressure Sensor
-Exhaust Pressure Detection: Pressure Sensor
-N2 Tube Material: SUS316, polyolefin